Filmetrics Optical Profiler

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Filmetrics Optical Profiler

Filmetrics Optical Profiler

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Unit: 浙江大学 > ZJU-UIUC Institute

Instrument manufacturer: Unicorn

Purchase date: 2021-08-27

Usage patterns: Sample presentation reservation

Specification: Profilm 3D

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Instrument manufacturer: Unicorn

Asset number: 21015150

Asset manager: ----

Purchase date: 2021-08-27

Instrument price: 41.75 Ten thousand yuan

Origin of instruments: USA

Instrument supplier: ----

Purchase manager: 詹玥莹

Main accessories: ----

Main parameter: 1. Measurement principle: non-contact, white light interference three-dimensional optical profilometer 2. Light source: uniform imaging, high efficiency, special design long life white LED. 3. Longitudinal scanning device: closed-loop feedback piezoelectric ceramic. 3.1 Longitudinal motion range: 100mm, 0.1nm measurement accuracy 3.2 Longitudinal scanning range (piezoelectric ceramic drive): 500um, 0.1nm measurement accuracy 3.3 Vertical direct scanning speed: 12um / sec 4. Software one-touch switching of measurement modes. 4.1 WLI and PSI two measurement modes 4.2 WLI thickness measurement range: 50nm-10mm 4.3 WLI mode RMS repeatability 1.0nm 4.4 PSI thickness measurement range: 0-3um 4.5 PSI mode RMS repeatability 0.1nm 4.6 Step height accuracy: 0.7% 4.7 Stage height accuracy: 0.1% 4.8 Stage height stability: 0.15% 4.9 Sample reflectance range: 0.05%-100% 4.10 ISO 25178 compatible: Yes 4.11 Step height values can be displayed as a histogram 5. ★ camera performance: 2592 × 1944 (5 megapixels), optical zoom: 1X, 2X, 4X optical zoom (effective pixels after zoom 648 × 484) 6. configuration manual maximum support 4 objective turrets and automatic position sensing and switching 7. ★ interference lens with a large field of view 8. Standard film: configuration SHS-CrOnSi-10um, 1.25 inch 10 micron step height standard thickness film. 9. ★Online online analysis platform, can upload online fibps file type data files for measurement, analysis, recording, calculation, to achieve the surface of the measured object 3D profile, generate files for easy sharing; Online APP (mobile processing software), free configuration can be used for mobile (such as cell phones, tablets) to store, share, view and analyze data APP. Through this APP, users can view and process offline data in real time 10. XY platform: manual and automatic focus, platform size 100mm × 100mm, four-way tilt manual horizontal adjustment, declination adjustment range +/- 5︒. 11. ★Equipment weight <18kg 12. Equipment volume <330 mm x 330mm

Introduction of instruments:

An economical optical profiler with both vertical scanning interference (WLI) and high-accuracy phase shift interference (PSI) technology, which can be used for high-precision surface measurement for a variety of applications high-precision surface characterization, such as three-dimensional surface profile, roughness and film thickness, is a must for high-precision non-contact surface characterization.


Working hours: 09:00-11:00;14:00-16:00
Minimum reservation time interval: 0.5 Hours
Maximum reservation time interval: 72 Hours
Minimum unit time of calendar: 0.5 Hours
Latest reservation time: Unauthorized user: 24Hours; General qualified user: 24Hours; Senior qualified user: 24Hours
Earlist reservation time: Unauthorized: 72 Hours 0 o'clock; Ordinary: 72 Hours 0 o'clock; Senior: 72 Hours 0 o'clock
Maximum effective number of reservations: 5 次/ Day
Costless revocation of reservation time: 1440 minutes

Specimen test by appointment only

Main instrument manager: 詹玥莹(邮箱:yueyingzhan@intl.zju.edu.cn)

Instrument manager: 李明峰(邮箱:mingfeng.21@intl.zju.edu.cn)

User qualification Working hours Non working time
Unauthorized qualification Need to review Need to review
General qualification Avoid audit Need to review
Senior qualification Avoid audit Avoid audit
To be audited
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Completed
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Occupied
No. Title Creation time Operation
No. Title File number Creation time Operation
Title Training Video Creation time Operation