Reactive Ion Etching System

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Reactive Ion Etching System

Reactive Ion Etching System

Instrument category: Micro/Nano Fabrication Center

Instrument mode:

Unit: 浙江大学 > Micro & Nano Public Platform

Instrument manufacturer: Oxford

Purchase date: 2022-07-29

Usage patterns: Sample presentation reservation,Machine-time reservation

Specification: PlasmaPro 80

Room number:----

Collection

Reservation

Instrument manufacturer: Oxford

Asset number: 22012311

Asset manager: 戈佳艳

Purchase date: 2022-07-29

Instrument price: 128.71 Ten thousand yuan

Origin of instruments: Oxford

Instrument supplier: ----

Purchase manager: 胡欢

Main accessories: ----

Main parameter: ----

Introduction of instruments:

Working hours: 08:30-12:00;13:00-17:00
Minimum reservation time interval: 0.5 Hours
Maximum reservation time interval: 168 Hours
Minimum unit time of calendar: 0.5 Hours
Latest reservation time: Unauthorized user: 24Hours; General qualified user: 24Hours; Senior qualified user: 24Hours
Earlist reservation time: Unauthorized: 720 Hours 0 o'clock; Ordinary: 720 Hours 0 o'clock; Senior: 720 Hours 0 o'clock
Maximum effective number of reservations: 5 次/ Day
Costless revocation of reservation time: 1440 minutes

Main instrument manager: 戈佳艳(邮箱:jiayange@intl.zju.edu.cn)

User qualification Working hours Non working time
Unauthorized qualification Need to review Need to review
General qualification Avoid audit Need to review
Senior qualification Avoid audit Avoid audit
To be audited
Valid
Completed
Breach of contrac
Occupied
No. Title Creation time Operation
No. Title File number Creation time Operation
Title Training Video Creation time Operation