Mask Aligner
- Instrument category Micro/Nano Fabrication Center
- Instrument mode
- Unit 浙江大学 > ZJU-UIUC Institute
- Instrument manufacturer Liansheng
- Purchase date 2021-06-03
- Usage patterns Sample presentation reservation,Machine-time reservation
- Specification EM4-Li
- Room number ----
使用指南
- No data temporarily
FAQ
- No data temporarily