Inductively Coupled Plasma Etching System
- Instrument category Micro/Nano Fabrication Center
- Instrument mode
- Unit 浙江大学 > Micro & Nano Public Platform
- Instrument manufacturer
- Purchase date 2023-01-17
- Usage patterns Sample presentation reservation,Machine-time reservation
- Specification SI 500
- Room number 1E-E107
使用指南
- No data temporarily
FAQ
- No data temporarily