Inductively Coupled Plasma Etching System
Inductively Coupled Plasma Etching System
Instrument category： Micro/Nano Fabrication Center
Instrument mode：
Unit： 浙江大学 > Micro & Nano Public Platform
Instrument manufacturer： ----
Purchase date： 2023-01-17
Usage patterns： Sample presentation reservation,Machine-time reservation
Specification： SI 500
Room number：1E-E107
Collection
Instrument manufacturer： ----
Asset number： 23003515
Asset manager： 戈佳艳
Purchase date： 2023-01-17
Instrument price： 239.66 Ten thousand yuan
Origin of instruments： ----
Instrument supplier： ----
Purchase manager： ----
Main accessories： ----
Main parameter： ----
Introduction of instruments：
| Working hours： | 08:30-17:00 |
|---|---|
| Minimum reservation time interval： | 0.25 Hours |
| Maximum reservation time interval： | 168 Hours |
| Minimum unit time of calendar： | 0.25 Hours |
| Latest reservation time： | Unauthorized user: 0Hours； General qualified user: 0Hours； Senior qualified user: 0Hours |
| Earlist reservation time： | Unauthorized: 336 Hours 0 o'clock； Ordinary: 336 Hours 0 o'clock； Senior: 336 Hours 0 o'clock |
| Maximum effective number of reservations： | 5 次/ Day |
| Costless revocation of reservation time： | 1440 minutes |
|
Main instrument manager： 戈佳艳(邮箱:jiayange@intl.zju.edu.cn) |
| User qualification | Working hours | Non working time |
|---|---|---|
| Unauthorized qualification | Need to review | Need to review |
| General qualification | Avoid audit | Need to review |
| Senior qualification | Avoid audit | Avoid audit |
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| No. | Title | File number | Creation time | Operation |
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| Title | Training Video | Creation time | Operation |
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