ICP Dry Etcher

ICP Dry Etcher

  • Instrument category
  • Instrument mode
  • Unit 浙江大学 > International Research Center for Information Science and Electronic Engineering
  • Instrument manufacturer Oxford Instruments Plasma Technology Co., Ltd
  • Purchase date 2018-11-02
  • Usage patterns Sample presentation reservation,Machine-time reservation
  • Specification PlasmaPro 100 Cobra 180
  • Room number ----

使用指南

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FAQ

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